WitrynaAmerican Vacuum Society Witryna23 lis 2024 · Some of the advanced design concepts in Silicon like super-junction technology have significant manufacturing roadblocks like diffusion, epi regrowth and implantation. In this work, we present results of both p-type and n-type channeled implants into 4º offcut N-type SiC substrates and Epitaxial layers using a Nissin Ion …
Contamination Control in Ion Implantation - OSTI.GOV
WitrynaCommence Delivery of Ion Implanter for Semiconductor IMPHEAT-II 2024.10.14 Publication of NISSIN REPORT 2024 2024.10.13 Nissin Electric Develops Japan’s first Energy Management System for Automatic Self-consignment Operation of Photovoltaic Power Generation 2024.09.08 Adding a New Model to the iDS-series Coating System … Witryna7 sty 2011 · The investigation and elimination or control of metallic contamination in ion implanters has been a leading, continuous effort at implanter OEMs and in fabs/IDMs alike. Much of the efforts have been in the area of control of sputtering through material and geometry changes in apertures, beamline and target chamber components. portable urinals for females
High temperature ion implanter for SiC and Si devices
WitrynaThe IMPHEAT-II, a new high-temperature implanter for power semiconductors, is developed. 2024 An office building is added at the Shiga Plant. Relocated a function of head office to Toji Office. Company More History More Quality and Environment-Related Initiatives More Business Centers More > Company > History Company Company … Witryna16 gru 2024 · We named it IMPHEAT-II, the second generation of high temperature ion implanter for SiC based power devices. Figure 1 is a photo of IMPHEAT-II. The basic … WitrynaIMPHEAT-II A high-temperature ion implanter with even more advanced high-temperature transport reliability and throughput than the IMPHEAT. Merit This high … irs delays new rule